Use 1 for normal vibration frequency, 2 for lateral vibration frequency and 3 for angular vibration frequency

**Notes **

An inertial mass suspended from two clamped beams is a structure often
used in MEMS accelerometers and other motion sensitive devices. A typical
structure is as shown above. It could be considered as a typical spring mass
system. Three different vibration modes are discussed here. Vibration
perpendicular to the plane of the mass, lateral vibration of the mass and a
torsional or angular vibration of the mass about the beam axis are discussed.
Use this form to estimate the vibration frequencies of normal, lateral and
angular modes. The influence of the beam and mass dimensions on these modal
frequencies could be understood.

The plot shows the amplitude frequency relationship for the given beam-mass. It shows the first resonance frequency as a sharp rise in amplitude. Using the cross hair tool, the resonant frequency and the corresponding relative amplitude can be obtained.

-The default material is Silicon with a Poisson's ratio of 0.27.

-The beam has uniform cross section.

-The weight of the beam and mass is uniformly distributed.

-There is no other load acting on the beam other than the weight of the mass and its own weight.

-The bending of the mass is negligible

-Damping is not involved.

Mechanics > Vibration > Free vibration > Clamped beam > Central mass