Material properties of commonly used MEMS materials

mat       material name
pro        property name


Use this form to find out some of the structural, physical and chemical properties of major MEMS related materials. Material properties of silicon and its oxide and nitride, polysilicon, silicon carbide, commonly used metals as well as acids and bases used in MEMS fabrication are given.

Unless otherwise mentioned, the properties are given at room temperature. Eventhough bulk properties of materials may not scale well in the microscopic level, that is used in most cases due to the lack of better numbers. Crystal defects in the thin film could give a much different value than that obtained for a bulk material. The properties of acids and bases are given at commonly used concentration levels, and is usually dependent on the temperature and concentration.

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