Vibration frequency of a round diaphragm
dia diameter of the diaphragm in µm
thc thickness of the
diaphragm in µm
den density of the material in kg/m3
ymod Young's modulus of the material of the diaphragm in GPa
pois Poisson's ratio
sel number denoting the
Use 2 for vibration frequency
Diaphragms or membranes as it is sometimes called, form the basic structural
element of MEMS pressure sensors. They are easy to fabricate, offer good
dynamic response and can be used over a wide range of pressures.
This design interface can be used to determine the natural vibration frequency
of a round diaphragm. The vibration frequency for the lowest vibration mode
can be estimated.
The plot shows the two lowest modal frequencies for the given diaphragm. Those
are the frequencies at which there is a sharp rise in amplitude. Using the
cross hair tool, those frequencies can be read out from the graph.
-The default material is Silicon with a Young's modulus of 180GPa and Poisson's
ratio of 0.3.
-The diaphragm has uniform thickness.
-The diaphragm is assumed to
be held rigidly at the outer perimeter. In reality it may be slightly flexible.
-The property of the material remain constant across the diaphragm.
diaphragm is not subjected to any pre-stress, and damping is not considered.
Mechanics > Vibration > Free vibration > Diaphragms > Round diaphragm