MEMS Technology Solutions
Product Overview
What is MEMSolver?
MEMSolver is one of its kind MEMS analytical software. MEMSolver is a powerful yet simple design and analysis tool for researchers, engineers and students working in the field of Micro Electro Mechanical Systems or MEMS. MEMS is a highly specialized inter-disciplinary field of engineering which engages in the development of micro mechanical sensors, actuators and other micro devices. Unlike some numerical analysis and finite element analysis software which require extensive programming skills and knowledge of the system to create a successful model, MEMSolver has ready made models and its associated mathematics wrapped up into one. Learn what is different?
MEMSolver is used in some of the most technically advanced nations and universities and also in some of the least known nations in the MEMS technology map. MEMSolver attempts to deliver MEMS knowledge and technology at affordable rates.
General description of the software
In most cases, the physics behind the behavior of MEMS devices can be expressed by mathematical expressions. MEMSolver works by creating a mathematical model of the system and generates analytical solutions to explain the behavior of the MEMS device. The user just has to enter the input parameters like length and width of the beam for example in a user friendly GUI, and the software will immediately calculate the relevant results and plot graphs that fully explain the MEMS device or part of it.
The software is divided into five modules namely mechanics, sensing, actuation, process and data analysis. Mechanics module is subdivided into three sub sections. The first subsection being structures where the most commonly used beams and diaphragm designs are examined. The second subsection discusses vibration of these structures, both free and forced vibrations. The third subsection discusses damping in the form of squeeze film and slide film damping. The fourth subsection covers topics on microfluidics which includes design of microfluidic channels and diffusion. Sensing module discusses sensing schemes widely used in MEMS namely piezoresistive, capacitive and piezoelectric sensing for designing pressure sensors and accelerometers. Actuation module examines the three widely used means of actuation namely electrostatic, thermal  and piezoelectric applied to some commonly used actuators like parallel plate, micromirror, comb drive, bimetallic and bimorf actuators. Process module is divided into six subsections namely lithography, oxidation, diffusion, implantation, film deposition and wet etching. This covers some of the most commonly used processes used in the development of MEMS devices. The data analysis module has a die calculator, unit conversion tool and lists the material properties of commonly used MEMS materials.
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